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Thermal scanning probe lithography for fabrication of perforated metallic films
Paloma E S Pellegrini (LJAD, ATLANTIS, CNRS), Francisco T Orlandini (LJAD, ATLANTIS, CNRS), Silvia V G Nista (LJAD, ATLANTIS, CNRS), St\'ephane Lanteri (LJAD, ATLANTIS, CNRS), Hugo Enrique Hern\'andez-Figueroa, Stanislav Moshkalev
https://arxiv.org/abs/…

Thermal scanning probe lithography for fabrication of perforated metallic films
Thermal scanning probe lithography offers high resolution and versatility, making it a promising alternative for fabricating photonic devices. Here, we introduce a new method that expands its applications by enabling direct fabrication of arbitrary perforated patterns on a silver film.