Tootfinder

Lithographic integration of TES microcalorimeters with SQUID multiplexer circuits for large format spectrometers
Robinjeet Singh, Avirup Roy, Daniel Becker, Johnathan D. Gard, Mark W. Keller, John A. B. Mates, Kelsey M. Morgan, Nathan J. Ortiz, Daniel R. Schmidt, Daniel S. Swetz, Joel N. Ullom, Leila R. Vale, Michael Vissers, Galen C. O'Neil, Joel C. Weber
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Lithographic integration of TES microcalorimeters with SQUID multiplexer circuits for large format spectrometers
Arrays of hundreds or thousands of low temperature detectors have been deployed for many experiments, both bolometers for long wavelength applications and calorimeters for shorter wavelength applications. One challenge that is common to many of these arrays is the efficient use of focal plane area to achieve a large fill fraction of absorbers coupled to detectors. We are developing an integrated fabrication of soft X-ray transition edge sensors (TES) and microwave SQUID multiplexers ($μ$MUX) w…