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Low-density InGaAs/AlGaAs Quantum Dots in Droplet-Etched Nanoholes
Saimon F. Covre Da Silva, Ailton J. Garcia Jr, Maximilian Aigner, Christian Weidinger, Tobias M. Krieger, Gabriel Undeutsch, Christoph Deneke, Ishrat Bashir, Santanu Manna, Melina Peter, Ievgen Brytavskyi, Johannes Aberl, Armando Rastelli
https://arxiv.org/abs/2508.08400

Low-density InGaAs/AlGaAs Quantum Dots in Droplet-Etched Nanoholes
Over the past two decades, epitaxial semiconductor quantum dots (QDs) have demonstrated very promising properties as sources of single photons and entangled photons on-demand. Among different growth methods, droplet etching epitaxy has allowed the growth of almost strain-free QDs, with low and controllable surface densities, small excitonic fine structure splitting (FSS), and fast radiative decays. Here, we extend the local droplet etching technique to In(Ga)As QDs in AlGaAs, thereby increasing…