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Wurtzite AlScN/AlN Superlattice Ferroelectrics Enable Endurance Beyond 1010 Cycles
Ruiqing Wang, Feng Zhu, Haoji Qian, Jiuren Zhou, Wenxin Sun, Siying Zheng, Jiajia Chen, Bochang Li, Yan Liu, Peng Zhou, Yue Hao, Genquan Han
https://arxiv.org/abs/2506.22212

Wurtzite AlScN/AlN Superlattice Ferroelectrics Enable Endurance Beyond 1010 Cycles
Wurtzite ferroelectrics are rapidly emerging as a promising material class for next-generation non-volatile memory technologies, owing to their large remanent polarization, intrinsically ordered three-dimensional crystal structure, and full compatibility with CMOS processes and back-end-of-line (BEOL) integration. However, their practical implementation remains critically constrained by a severe endurance bottleneck: under conditions where the remanent polarization (2Pr) reaches or exceeds 200 …